Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (1): 144-148.

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Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software

LI You-bin;ZHANG Sheng-tao;HE Yin-feng;LIANG Shi-min;HAN Jin-dou;FU Hao;ZHAO Li-li

Online:2019-01-15 Published:2021-01-20

Abstract

CLC Number:

O482

LI You-bin;ZHANG Sheng-tao;HE Yin-feng;LIANG Shi-min;HAN Jin-dou;FU Hao;ZHAO Li-li. Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software[J]. Journal of Synthetic Crystals, 2019, 48(1): 144-148.

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Three Dimensional Numerical Simulation of Electronic Grade Polysilicon Reduction Furnace Based on PolySim Software

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