Epitaxial Growth and Characterizations of Si1－xGex Alloys on Si Substrate

JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (11): 2178-2193.

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Epitaxial Growth and Characterizations of Si1－xGex Alloys on Si Substrate

YUAN Ziyuan;PAN Rui;XIA Shunji;WEI Lian;YE Jiajia;LI Chen;CHEN Yanfeng;LU Hong

Online:2020-11-15 Published:2021-01-20

Abstract

CLC Number:

TN34

YUAN Ziyuan, PAN Rui, XIA Shunji, WEI Lian, YE Jiajia, LI Chen, CHEN Yanfeng, LU Hong. Epitaxial Growth and Characterizations of Si1－xGex Alloys on Si Substrate[J]. Journal of Synthetic Crystals, 2020, 49(11): 2178-2193.

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Epitaxial Growth and Characterizations of Si1－xGex Alloys on Si Substrate

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