Effect of Sputtering Plume and Substrate Angle on the Optical Properties of Oxygen-Doped Molybdenum Disulfide Film

Abstract

Abstract: Molybdenum disulfide (MoS₂) has good thermal and chemical stability and relatively high mobility in the environment. It has been used in the applications of gas sensors, photodetectors and field effect transistors. Oxygen-doped molybdenum disulfide (MoS_2-xO_x) generated by oxygen-assisted technology can not only regulate the size of MoS₂ single crystal, but also improve the photoluminescence intensity of MoS₂ single crystal. MoS_2-xO_x films were prepared and their optical properties were investigated in this paper. First, radio frequency reactive magnetron sputtering technology was used to prepare the precursors of MoS_2-xO_x films; next, the precursors in natural environment for 60 d were oxidized; finally, the MoS_2-xO_x films after a thermal annealing process were obtained. Herein, the angle between the sputtering plume and the glass substrate was specifically varied. The optical properties of MoS_2-xO_x films were investigated. X-ray photoelectron spectroscopy was used to analyze the elements and valence states of the samples. Scanning electron microscopy results show that the surface morphology is optimal at an angle of 45° (θ=45°) between the sputtering plume and the substrate. UV-Vis spectrophotometry results show that the optical band gap of the MoS_2-xO_x films decreasing as the thickness and oxygen content increasing. COMSOL Multiphysics software was utilized to simulate the transmittance of MoS_2-xO_x films, and the theoretical and experimental results agree well. The results of this paper will provide experimental data reference for the application of MoS_2-xO_x in the field of optical devices.

Key words: oxygen-doped molybdenum disulfide, oxygen-assisted technology, magnetron sputtering, plume, transmittance, optical band gap, COMSOL

CLC Number:

ZHAO Zinan, WU Jintao, LIANG Zhijian, ZHU Yabin, LIU Ge, CHEN Yunlin. Effect of Sputtering Plume and Substrate Angle on the Optical Properties of Oxygen-Doped Molybdenum Disulfide Film[J]. Journal of Synthetic Crystals, 2022, 51(11): 1871-1877.

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