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JOURNAL OF SYNTHETIC CRYSTALS ›› 2022, Vol. 51 ›› Issue (5): 753-758.

Special Issue: 超硬材料与特殊环境晶体生长技术

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Thirty Years of Chemical Vapor Deposition (CVD) Diamond Films Research in China

LYU Fanxiu, LI Chengming   

  1. State Key Laboratory for Advanced Metals and Material, Institute for Advanced Materials and Technology (IAMT), University of Science and Technology Beijing, Beijing 100083, China
  • Received:2022-04-25 Online:2022-05-15 Published:2022-06-17

Abstract: Since the advent of the chemical vapor deposition (CVD) diamond film 1980s, Chinese researchers quickly follow up in a short time from the national level layout. In the era when China's science and technology need to catch up, the implementation of the “863 Program” has strongly promoted the progress of the CVD diamond film technology in China from 1987 to 2016. Until now, the national key research and development program is still supporting the application research of CVD diamond in various fields. The review of the development of CVD diamond film in the past 30 years has important reference significance for the design of science and technology strategy, the formulation of science and technology policy, the implementation of scientific research plan and the implementation of scientific and technological achievements in China.

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