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JOURNAL OF SYNTHETIC CRYSTALS ›› 2023, Vol. 52 ›› Issue (1): 83-88.

• Research Articles • Previous Articles     Next Articles

Influence of AlGaN Double Barrier Structure on Crystal Quality and Luminescent Properties of InGaN/GaN MQWs Solar Cell Materials Containing High Indium Components

SHAN Hengsheng1,2, LI Minghui1,3, LI Chengke1,3, LIU Shengwei1,3, MEI Yunjian1,3, SONG Yifan1,3, LI Xiaoya4   

  1. 1. Materials Institute of Atomic and Molecular Science, Shaanxi University of Science and Technology, Xian 710021, China;
    2. Key Laboratory of Wide Band-Gap Semiconductor Materials, Ministry of Education, Xidian University, Xian 710071,China;
    3. School of Materials Science and Engineering, Shaanxi University of Science and Technology, Xian 710021, China;
    4. School of Information Science and Technology, Northwest University, Xian 710127, China
  • Received:2022-09-20 Online:2023-01-15 Published:2023-02-15

Abstract: In this paper, a double-barrier structure AlGaN-InGaN/GaN MQWs-AlGaN solar cell materials containing high indium components was grown on (001)-oriented patterned sapphire substrate (PSS) by metal organic chemical vapor deposition (MOCVD) technology. Compared with the MQWs solar cell material containing AlGaN electron barrier structure with low indium, it is found that the material of this structure has a smaller full width at half maximum (FWHM) by high-resolution X-ray diffraction (HRXRD) and photoluminescence (PL) spectroscopy analysis, and the dislocation density of this structural material is also reduced by an order of magnitude to 107 cm-2 by the dislocation density formula; at the same time, the strain relaxation in the active region decreases by 51%. In addition, luminous intensity of this structural material is enhanced by 35%. The results show that the epitaxial material containing AlGaN double barrier structure can reduce the dislocation density in the active region, decrease the number of non-radiative recombination centers, and increase the number of effective photo-generated carriers in the active region, which provides experimental basis for the preparation of high efficiency solar cells.

Key words: metal organic chemical vapor deposition, solar cell epitaxial material, AlGaN double barrier structure, InGaN/GaN MQWs, dislocation density, photo-induced carrier

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