[1] JANG H E, CHO H H, YU H K, et al. Synthesis of polycrystalline gallium oxide solar-blind ultraviolet photodetector by aerosol deposition[J]. Journal of the European Ceramic Society, 2023, 43(6): 2534-2540. [2] LIANG J B, TAKATSUKI D, HIGASHIWAKI M, et al. Fabrication of β-Ga2O3/Si heterointerface and characterization of interfacial structures for high-power device applications[J]. Japanese Journal of Applied Physics, 2022, 61: SF1001. [3] 姬凯迪. 基于多晶Ga2O3的无源元件的研究与制备[D]. 贵阳: 贵州大学, 2021. JI K D. Research and preparation of passive components based on polycrystalline Ga2O3[D].Guiyang: Guizhou University, 2021 (in Chinese). [4] CHEN Z H, WANG Y S, ZHANG N, et al. Effects of preparation parameters on growth and properties of β-Ga2O3 film[J]. Chinese Physics B, 2023, 32(1): 017301. [5] MCCANDLESS J P, PROTASENKO V, MORELL B W, et al. Controlled Si doping of β-Ga2O3 by molecular beam epitaxy[J]. Applied Physics Letters, 2022, 121(7): 072108. [6] ITOH T, MAUZE A, ZHANG Y W, et al. Continuous Si doping in (010) and (001) β-Ga2O3 films by plasma-assisted molecular beam epitaxy[J]. APL Materials, 2023, 11(4): 041108. [7] PILLIADUGULA R, GOPALAKRISHNAN N. Room temperature ammonia sensing performances of pure and Sn doped β-Ga2O3[J]. Materials Science in Semiconductor Processing, 2021, 135: 106086. [8] DANG J N, ZHENG S W, CHEN L, et al. Electronic structures and optical properties of Si- and Sn-doped β-Ga2O3: a GGA+ U study[J]. Chinese Physics B, 2019, 28(1): 016301. [9] ARIMA-OSONOI H, YAMAZAKI K, SIMURA R, et al. Local structure investigations of Sn and Mn doped in β-Ga2O3 by X-ray absorption spectroscopy[J]. Journal of Crystal Growth, 2021, 570: 126223. [10] WANG B G, LOOK D, FARLOW G. Optical and electrical properties of Ti-doped β-Ga2O3 (Ti3+∶β-Ga2O3) bulk crystals grown by floating zone method[J]. Journal of Physics D: Applied Physics, 2020, 53(44): 444001. [11] 陈绍华, 穆文祥, 张 晋, 等. Ni掺杂β-Ga2O3单晶的光、电特性研究[J]. 人工晶体学报, 2023, 52(8): 1373-1377. CHEN S H, MU W X, ZHANG J, et al. Optical and electrical properties of Ni-doped β-Ga2O3 single crystal[J]. Journal of Synthetic Crystals, 2023, 52(8): 1373-1377 (in Chinese). [12] 孟 婷, 赵二俊, 刘雨欣. Co掺杂β-Ga2O3的电学性质和电荷转变能级的第一性原理计算[J]. 原子与分子物理学报, 2023, 40(2): 187-194. MENG T, ZHAO E J, LIU Y X. First-principle calculation of the electrical properties and charge transition energy levels for Co-doped β-Ga2O3[J]. Journal of Atomic and Molecular Physics, 2023, 40(2): 187-194 (in Chinese). [13] WANG D, MA X C, CHEN R R, et al. Solar-blind ultraviolet photodetectors based on Ta-doped β-Ga2O3 heteroepitaxial films[J]. Optical Materials, 2022, 129: 112491. [14] CHEN J W, TANG H L, LI Z W, et al. Highly sensitive X-ray detector based on a β-Ga2O3∶Fe single crystal[J]. Optics Express, 2021, 29(15): 23292-23299. [15] FENG Z X, BHUIYAN A F M A U, KALARICKAL N K, et al. Mg acceptor doping in MOCVD (010) β-Ga2O3[J]. Applied Physics Letters, 2020, 117(22): 222106. [16] 颜 超. 铝掺杂氧化镓薄膜光电特性研究[D]. 西安: 西安电子科技大学, 2020. YAN C. The examination on photoelectric properties of Al-doped Ga2O3 thin films[D].Xi’an: Xidian University, 2020 (in Chinese). [17] 张振东. 氧空位及Ti、Al掺杂下β-Ga2O3的电子结构及光学性质的第一性原理计算[D]. 贵阳: 贵州大学, 2020. ZHANG Z D. First-principle calculations of electronic and optical properties of β-Ga2O3 with oxygen vacancies and Ti, Al doping[D].Guiyang: Guizhou University, 2020 (in Chinese). [18] 王显盛, 万敏华, 王银海, 等. Al替代对β-Ga2O3∶Cr3+结构与发光性能影响[J]. 光谱学与光谱分析, 2013, 33(11): 2921-2925. WANG X S, WAN M H, WANG Y H, et al. Structure and luminescence properties of Ga2O3∶Cr3+ by Al doping[J]. Spectroscopy and Spectral Analysis, 2013, 33(11): 2921-2925 (in Chinese). [19] 姬凯迪, 高灿灿, 杨发顺, 等. 后退火气氛对磁控溅射制备β-Ga2O3薄膜材料的影响[J]. 人工晶体学报, 2021, 50(6): 1056-1061. JI K D, GAO C C, YANG F S, et al. Effect of post annealing atmosphere on β-Ga2O3 thin films prepared by magnetron sputtering[J]. Journal of Synthetic Crystals, 2021, 50(6): 1056-1061 (in Chinese). [20] LU J J, LU Y M, TASI S I, et al. Conductivity enhancement and semiconductor-metal transition in Ti-doped ZnO films[J]. Optical Materials, 2007, 29(11): 1548-1552. [21] 马书懿, 史新福, 袁玉凤, 等. 不同Al掺杂对ZnO薄膜结构及光学性质的影响[J]. 西北师范大学学报(自然科学版), 2009, 45(5): 48-51. MA S Y, SHI X F, YUAN Y F, et al. The influence of different Al concentration doped ZnO thin film on structural and optical properties[J]. Journal of Northwest Normal University (Natural Science), 2009, 45(5): 48-51 (in Chinese). |