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JOURNAL OF SYNTHETIC CRYSTALS ›› 2007, Vol. 36 ›› Issue (1): 180-183.

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Effects of Different Height and Space of a Multi-turn Inductive Coil on Temperature Distribution in the Large-size 6H-SiC Growth System

ZHANG Qun-she;CHEN Zhi-ming;LI Liu-chen;PU Hong-bin;FENG Xian-feng   

  • Online:2007-02-15 Published:2021-01-20

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