Abstract: The principle and method of single crystal stress measurement via X-ray were presented. Si single crystal's stress was measured, the difference between double axis rocking model and triple axis ω-2θ scan model was compared, the effect of the number of measured arrays and θ_0 on the stress measurement was discussed. The results showed that it was more credible measured by triple axis ω-2θ scan model than by double axis rocking model, the multiple regression analysis method could be used to calculate the stress of single crystal without stress-free θ_0, the number of measured arrays should be more than 6.

Key words: The principle and method of single crystal stress measurement via X-ray were presented. Si single crystal's stress was measured, the difference between double axis rocking model and triple axis ω-2θ scan model was compared, the effect of the number of measured arrays and θ_0 on the stress measurement was discussed. The results showed that it was more credible measured by triple axis ω-2θ scan model than by double axis rocking model, the multiple regression analysis method could be used to calculate the stress of single crystal without stress-free θ_0, the number of measured arrays should be more than 6.