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JOURNAL OF SYNTHETIC CRYSTALS ›› 2006, Vol. 35 ›› Issue (1): 99-103.
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WANG Zhan-yin;KONG Yong-fa;CHEN Shao-lin;XU Jing-jun
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RSSOnline:2006-02-15
Published:2021-01-20
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WANG Zhan-yin;KONG Yong-fa;CHEN Shao-lin;XU Jing-jun. Study on the Chemical Mechanical Polishing of Large Diameter Lithium Niobate Wafer[J]. Journal of Synthetic Crystals, 2006, 35(1): 99-103.
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