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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (7): 1997-2004.
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DONG Jun;SHI Bing-chuan;HE Yong-guo;LUAN Shi-lin
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RSSOnline:2015-07-15
Published:2021-01-20
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DONG Jun;SHI Bing-chuan;HE Yong-guo;LUAN Shi-lin. Research on Resistivity Curve of Phosphorus Examination in Poly-silicon Quality Inspection[J]. Journal of Synthetic Crystals, 2015, 44(7): 1997-2004.
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