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JOURNAL OF SYNTHETIC CRYSTALS ›› 2015, Vol. 44 ›› Issue (12): 3439-3443.
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LIU Hai-jun;ZHU Xiang-long;KANG Ren-ke;DONG Zhi-gang
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RSSOnline:2015-12-15
Published:2021-01-20
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LIU Hai-jun;ZHU Xiang-long;KANG Ren-ke;DONG Zhi-gang. Research on the Suitability of Inverting Method to Cancel Gravity-induced Deflection of Wafers[J]. Journal of Synthetic Crystals, 2015, 44(12): 3439-3443.
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