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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (7): 1474-1479.

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Effect of Variable Temperatures Growing Polysilicon on Geometric Parameters of 8 inch Silicon Wafer

QU Xiang;XU Ji-ping;WANG Hai-tao;HE Yu;WANG Xin;YANG Kai;WANG Lei   

  • Online:2018-07-15 Published:2021-01-20

CLC Number: