Ca2+/Mg2+/Zr4+不同化学计量比掺杂钆镓石榴石的性能

doi:10.16553/j.cnki.issn1000-985x.2024.0233

摘要/Abstract

摘要： 掺杂钆镓石榴石(SGGG)晶体是一种用于磁光单晶薄膜液相外延生长的重要衬底材料,结构均一、物性稳定的SGGG晶体是实现磁光单晶薄膜制备的基础。本文采用提拉法生长出4个不同Ca²⁺/Mg²⁺/Zr⁴⁺化学计量比掺杂的钆镓石榴石晶体。X射线摇摆曲线测试表明:上述制备的晶体没有孪晶,结晶度高,半峰全宽(FWHM)分别为2.04′、2.07′、1.85′和1.98′,晶格常数为12.440 4~12.481 8 Å,位错密度为53~161 cm^-2;原子力显微镜(AFM)测试晶体(111)面的表面粗糙度为0.123~0.244 nm;晶体的热膨胀系数为8.27×10^-6~8.64×10^-6;晶体在波长500~2 500 nm具有良好的透过率。通过调节Ca²⁺/Mg²⁺/Zr⁴⁺掺杂量制备的SGGG晶体可以满足磁光单晶薄膜外延生长用衬底材料的性能要求。

关键词: 钆镓石榴石; 钙镁锆掺杂; 磁光晶体; 衬底材料; 提拉法

Abstract: Substituted gadolinium gallium garnet (SGGG) crystal is an important substrate material for liquid-phase epitaxial growth of magneto-optical single crystal thin films. SGGG crystals with uniform structure and stable physical properties are the basis for the preparation of magneto-optical single crystal thin films. This article reports the preparation of four different Ca²⁺/Mg²⁺/Zr⁴⁺ doped gadolinium gallium garnet crystals using the Czochralski method.The X-ray rocking curve test shows that the prepared crystals are high crystallinity without twinning, and full width at half maximum (FWHM) is 2.04′, 2.07′, 1.85′, 1.98′, respectively, the lattice constant is 12.440 4~12.481 8 Å. The number of dislocation density is 53~161 cm^-2. The surface roughness of crystal surface (111) measured by atomic force microscopy (AFM) ranges from 0.123 nm to 0.244 nm. The thermal expansion coefficient of the crystal is 8.27×10^-6~8.64×10^-6. The crystal has good transmittance in the wavelength range of 500~2 500 nm. SGGG crystals prepared by adjusting the doping amount of Ca²⁺/Mg²⁺/Zr⁴⁺ can meet the performance requirements of substrate materials for epitaxial growth of magneto-optical single crystal thin films.

Key words: gadolinium gallium garnet; calcium magnesium zirconium doping; magneto-optic single crystal; substrate material; Czochralski method

中图分类号:

O731

邵梅方, 冯晋阳, 侯田江, 马晓. Ca²⁺/Mg²⁺/Zr⁴⁺不同化学计量比掺杂钆镓石榴石的性能[J]. 人工晶体学报, 2025, 54(4): 543-552.

SHAO Meifang, FENG Jinyang, HOU Tianjiang, MA Xiao. Properties of Gadolinium Gallium Garnet Substituded with Different Stoichiometric Ratios of Ca²⁺/Mg²⁺/Zr⁴⁺[J]. Journal of Synthetic Crystals, 2025, 54(4): 543-552.

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Ca²⁺/Mg²⁺/Zr⁴⁺不同化学计量比掺杂钆镓石榴石的性能

Properties of Gadolinium Gallium Garnet Substituded with Different Stoichiometric Ratios of Ca²⁺/Mg²⁺/Zr⁴⁺

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