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人工晶体学报 ›› 2004, Vol. 33 ›› Issue (4): 553-558.

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声表面波用压电晶体的新进展

徐家跃;武安华;陆宝亮;张爱琼;范世(马山豆);夏宗仁   

  1. 中国科学院上海硅酸盐研究所,上海,200050;中电科技德清华莹电子有限公司,德清,313216
  • 出版日期:2004-08-15 发布日期:2021-01-20

Recent Developments of Piezoelectric Crystals for SAW Applications

  • Online:2004-08-15 Published:2021-01-20

摘要: 报道了我们在Li2B4O7、Sr3Ga2Ge4O14、LiNbO3、LiTaO3等声表面波用压电晶体材料方面的最新研究进展.采用改进型坩埚下降法成功生长了直径3~4英寸的Li2B4O7晶体,并实现了批量生产.作为硅酸镓镧系列新型压电晶体之一,Sr3Ga2Ge4O14晶体具有最大的压电系数.报道了直径2英寸Sr3Ga2Ge4O14晶体的生长结果,测试了该晶体的压电性能.在CO2(90;)、H2(10;)混合气氛中,分别在700℃和450℃下对LN和LT晶片进行化学还原处理,成功制备了3英寸LN和LT低静电黑片,不仅减少了器件制作工序,而且使成品率提高了5~8百分点.此外,在密封坩埚中生长了低静电LiNbO3晶体,观察到一些新的现象.

关键词: 压电;坩埚下降法;晶体生长;黑片;声表面波

Abstract: Recent developments of piezocrystals, Li2B4O7, Sr3Ga2Ge4O14, LiNbO3 and LiTaO3 in our laboratory were reported in this paper. Li2B4O7 single crystals of 3 to 4 inches in diameter have been grown successfully by the modified vertical Bridgman method and mass production of large size Li2B4O7 crystals has been realized. Sr3Ga2Ge4O14 (SGG) crystal is a novel piezoelectric crystal with the largest piezoelectric constants among the langasite family. Bridgman growth of SGG crystal up to 2 inches in diameter has been reported and its piezoelectric properties have been measured. In order to improve the yield of SAW devices, pyro-free LiNbO3 and LiTaO3 wafers were prepared by chemical reduction at 700℃ and 450℃ respectively under a mixed atmosphere of CO2 and H2. Bridgman growth of LiNbO3 crystals was also investigated and some new phenomena were observed.

Key words: Recent developments of piezocrystals, Li2B4O7, Sr3Ga2Ge4O14, LiNbO3 and LiTaO3 in our laboratory were reported in this paper. Li2B4O7 single crystals of 3 to 4 inches in diameter have been grown successfully by the modified vertical Bridgman method and mass production of large size Li2B4O7 crystals has been realized. Sr3Ga2Ge4O14 (SGG) crystal is a novel piezoelectric crystal with the largest piezoelectric constants among the langasite family. Bridgman growth of SGG crystal up to 2 inches in diameter has been reported and its piezoelectric properties have been measured. In order to improve the yield of SAW devices, pyro-free LiNbO3 and LiTaO3 wafers were prepared by chemical reduction at 700℃ and 450℃ respectively under a mixed atmosphere of CO2 and H2. Bridgman growth of LiNbO3 crystals was also investigated and some new phenomena were observed.

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