关键词: 晶体生长;提拉法;Cortex-M3;模糊PID;μC/OSII

Abstract: Fuzzy PID control system based on ARM Cortex-M3 core has been designed for the process of pulling technique of laser crystal.The temperature distribution for the crystal growth can be determined by adapting Fuzzy PID control algorithm on the weighing singnal.According to the growth model,the simulation has been finished theoretically, the systerm has been used in TDL-J50 practically,and the accurate and stable control of crystal growing instantaneous rate for Fuzzy PID control during the crystal growing process was realized.

Key words: Fuzzy PID control system based on ARM Cortex-M3 core has been designed for the process of pulling technique of laser crystal.The temperature distribution for the crystal growth can be determined by adapting Fuzzy PID control algorithm on the weighing singnal.According to the growth model,the simulation has been finished theoretically, the systerm has been used in TDL-J50 practically,and the accurate and stable control of crystal growing instantaneous rate for Fuzzy PID control during the crystal growing process was realized.