关键词: 微波等离子体;化学气相沉积(CVD);金刚石单晶

Abstract: Main method of preparation of single crystal diamond and carries on their comparison was introduced , the research progress of the preparation of diamond single crystal by microwave plasma chemical vapor deposition were reviewed from the choice of seed crystal , pretreatment and synthetic technology , and introduces the progress in preparation of single crystal diamond at home and abroad , the last application of CVD single crystal diamond in the electronic field was prospected .

Key words: Main method of preparation of single crystal diamond and carries on their comparison was introduced , the research progress of the preparation of diamond single crystal by microwave plasma chemical vapor deposition were reviewed from the choice of seed crystal , pretreatment and synthetic technology , and introduces the progress in preparation of single crystal diamond at home and abroad , the last application of CVD single crystal diamond in the electronic field was prospected .