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人工晶体学报 ›› 2017, Vol. 46 ›› Issue (10): 2077-2082.

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多晶硅晶体生长中固-液界面研究进展

张发云;饶森林;王发辉;龚洪勇;胡云;陈小会;刘俊   

  1. 江西省高等学校硅材料重点实验室,新余 338004;新余学院,新能源科学与工程学院,新余 338004;江西省高等学校硅材料重点实验室,新余,338004
  • 发布日期:2021-01-20
  • 基金资助:
    国家自然科学基金(51664047);江西省自然科学基金(20132BAB206021)

Research Progress on the Solid-liquid Interface in the Crystal Growth of Polycrystalline Silicon

ZHANG Fa-yun;RAO Sen-lin;WANG Fa-hui;GONG Hong-yong;HU Yun;CHEN Xiao-hui;LIU Jun   

  • Published:2021-01-20

摘要: 论述了多晶硅晶体生长技术的研究现状,探讨了多晶硅在定向凝固过程中的生长机制,重点阐述了多晶硅定向生长中固-液界面的形貌、杂质分布、数学模型、数值模拟以及外场对界面调控的影响,归纳总结目前国内外多晶硅生长界面的研究现状,展望了多晶硅晶体生长过程中固-液界面调控技术的发展前景.

关键词: 多晶硅;界面;定向生长;杂质;外场

Abstract: The development on the crystal growth of polycrystalline silicon as discussed , and the growth mechanism on the polycrystalline silicon during the directional solidification process was analyzed .Then it focuses on the morpholgy of solid-liquid interface , imputity distribution , mathematical model , numerical simulation and the effect of external field on interface-controlled for polycrystalline silicon during the solidification process , and summarizes the research on the interface in the crystal growth of polycrystalline silicon at the domestic and abroad .Finally, the paper proposes the development prospect of solid-liquid interface controlled in the crystal growth of polycrystalline silicon .

Key words: The development on the crystal growth of polycrystalline silicon as discussed , and the growth mechanism on the polycrystalline silicon during the directional solidification process was analyzed .Then it focuses on the morpholgy of solid-liquid interface , imputity distribution , mathematical model , numerical simulation and the effect of external field on interface-controlled for polycrystalline silicon during the solidification process , and summarizes the research on the interface in the crystal growth of polycrystalline silicon at the domestic and abroad .Finally, the paper proposes the development prospect of solid-liquid interface controlled in the crystal growth of polycrystalline silicon .

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