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人工晶体学报 ›› 2017, Vol. 46 ›› Issue (3): 550-554.

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温和氢气等离子体对薄层二硫化钼的影响研究

张学成;肖少庆;南海燕;张秀梅;闫大为;顾晓峰   

  1. 江南大学电子工程系,物联网技术应用教育部工程研究中心,无锡 214122
  • 出版日期:2017-03-15 发布日期:2021-01-20
  • 基金资助:
    国家自然科学基金(61404061);江苏省自然科学青年基金(BK20140168);江苏省产学研联合创新资金(BY2014023-19)

Investigation on Few-layer MoS2Treated by Soft Hydrogen Plasma

ZHANG Xue-cheng;XIAO Shao-qing;NAN Hai-yan;ZHANG Xiu-mei;YAN Da-wei;GU Xiao-feng   

  • Online:2017-03-15 Published:2021-01-20

摘要: 薄层二硫化钼(MoS2)作为一种二维过渡金属硫属化合物(TMDC)具有较好的光学和电学特性,在目前的半导体光电功能器件领域中具有良好的应用前景.本文主要采用一种温和等离子体技术并在以氢气作为先驱气体的环境下对薄层二硫化钼进行处理,研究处理前后以及后续退火后薄层二硫化钼的光学与电学特性的变化.研究表明,氢原子在温和等离子体的作用下会渗入薄层MoS2,从而改变原始的晶格结构并影响MoS2的晶格振动,导致荧光淬灭,同时使薄层MoS2趋于本征或者p型.后续退火会引起极少数MoS2分子与氢原子的重新键合,从而改变其带隙.

关键词: 薄层二硫化钼;温和等离子体;拉曼光谱;荧光;场效应晶体管

Abstract: As a two-dimensional transition-metal dichalcogenide (TMDC), few-layer molybdenum disulfide (MoS2) possesses excellent optical and electrical properties and thus shows a great prospect in the field of optoelectronic functional devices.In this work, mechanically exfoliated few-layer MoS2 flakes were treated by a novel soft hydrogen plasma followed by post annealing and the resultant variations in both optical and electrical properties were systematically investigated.It has been demonstrated that hydrogen atoms may penetrate into MoS2 lattices with the help of soft hydrogen plasma and consequently change pristine lattice structure as well as lattice vibration, leading to fluorescence quenching and at the same time making n-type few-layer MoS2 become intrinsic or p-type doping.Post annealing after soft hydrogen plasma treatment may induce the bonding of a very few MoS2 molecules with hydrogen atoms, giving rise to the bule shift of optical band gap.

Key words: As a two-dimensional transition-metal dichalcogenide (TMDC), few-layer molybdenum disulfide (MoS2) possesses excellent optical and electrical properties and thus shows a great prospect in the field of optoelectronic functional devices.In this work, mechanically exfoliated few-layer MoS2 flakes were treated by a novel soft hydrogen plasma followed by post annealing and the resultant variations in both optical and electrical properties were systematically investigated.It has been demonstrated that hydrogen atoms may penetrate into MoS2 lattices with the help of soft hydrogen plasma and consequently change pristine lattice structure as well as lattice vibration, leading to fluorescence quenching and at the same time making n-type few-layer MoS2 become intrinsic or p-type doping.Post annealing after soft hydrogen plasma treatment may induce the bonding of a very few MoS2 molecules with hydrogen atoms, giving rise to the bule shift of optical band gap.

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