氧化镓纳米材料的制备及其在光电探测方面的应用研究进展

摘要/Abstract

摘要： 近年来,半导体的纳米材料凭借其奇特的介观物理特性,成为当前研究的热点,特别是纳米金属氧化物。氧化镓纳米材料具备优异的光电、气敏、耐压且低损耗等特性,为材料学、电子学和化学等多个研究领域带来了新的机遇。本文概述了氧化镓纳米结构的制备方法,并展望了其在光电探测方面的应用。

关键词: 氧化镓, 纳米材料, 制备方法, 光电探测

Abstract: In recent years, the nanostructures of semiconductor materials has attracted wide attention because of its unique and novel size-related characteristics, especially nano-metal oxides. Gallium oxide nanomaterials have excellent photoelectric properties, gas sensing properties, pressure resistance and low loss properties, which bring new opportunities to many research fields such as materials science, electronics and chemistry. In this paper,the preparation methods of nano gallium oxide are reviewed, and its application in photoelectric detection is prospected.

Key words: gallium oxide, nanomaterial, preparation method, photoelectric detection

中图分类号:

O649

庄文昌, 张洁, 李钦堂, 朱文友, 贾志泰. 氧化镓纳米材料的制备及其在光电探测方面的应用研究进展[J]. 人工晶体学报, 2020, 49(12): 2376-2382.

ZHUANG Wenchang, ZHANG Jie, LI Qintang, ZHU Wenyou, JIA Zhitai. Research Progress on Preparation of Gallium Oxide Nanomaterials and Its Application in Photoelectric Detection[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2020, 49(12): 2376-2382.

参考文献

[1] Zhang H Z, Kong Y C, Wang Y Z, et al. Ga₂O₃ nanowires prepared by physical evaporation[J]. Solid State Communications, 1999, 109(11): 677-682.
[2] 曹轶森.一维氧化镓纳米线的制备与应用研究[D].北京:北京工业大学,2017.
[3] 汪舟.Ⅲ-Ⅴ族纳米线的制备及其在太阳能电池中的应用[D].北京:北京化工大学,2018.
[4] Zhang X Y, Huang H J, Zhang Y G, et al. Phase transition of two-dimensional β-Ga₂O₃ nanosheets from ultrathin γ-Ga₂O₃ nanosheets and their photocatalytic hydrogen evolution activities[J]. ACS Omega, 2018, 3(10): 14469-14476.
[5] Muruganandham M, Amutha R, Wahed M S M A, et al. Controlled fabrication of α-GaOOH and α-Ga₂O₃ self-assembly and its superior photocatalytic activity[J]. The Journal of Physical Chemistry C, 2012, 116(1): 44-53.
[6] Shin G, Kim H Y, Kim J. Deep-ultraviolet photodetector based on exfoliated n-type β-Ga₂O₃ nanobelt/p-Si substrate heterojunction[J]. Korean Journal of Chemical Engineering, 2018, 35(2): 574-578.
[7] Wang S L, Sun H L, Wang Z, et al. In situ synthesis of monoclinic β-Ga₂O₃ nanowires on flexible substrate and solar-blind photodetector[J]. Journal of Alloys and Compounds, 2019, 787: 133-139.
[8] Yang M Z, Sun C L, Wang T L, et al. Graphene-oxide-assisted synthesis of Ga₂O₃ nanosheets/reduced graphene oxide nanocomposites anodes for advanced alkali-ion batteries[J]. ACS Applied Energy Materials, 2018, 1(9): 4708-4715.
[9] Huang C C, Yeh C S. GaOOH, and β- and γ-Ga₂O₃nanowires: preparation and photoluminescence[J]. New J Chem, 2010, 34(1): 103-107.
[10] Roy R, Hill V G, Osborn E F. Polymorphism of Ga₂O₃ and the system Ga₂O₃-H₂O[J]. Journal of the American Chemical Society, 1952, 74(3): 719-722.
[11] Playford H Y, Hannon A C, Barney E R, et al. Structures of uncharacterised polymorphs of gallium oxide from total neutron diffraction[J]. Chemistry - A European Journal, 2013, 19(8): 2803-2813.
[12] Reddy L S, Ko Y H, Yu J S. Hydrothermal synthesis and photocatalytic property of β-Ga₂O₃ nanorods[J]. Nanoscale Res Lett, 2015, 10(1): 364.
[13] Guo D Y, Wu Z P, Li P G, et al. Magnetic anisotropy and deep ultraviolet photoresponse characteristics in Ga₂O₃∶Cr vermicular nanowire thin film nanostructure[J]. RSC Advances, 2015, 5(17): 12894-12898.
[14] Sharma S, Sunkara M K. Direct synthesis of gallium oxide tubes, nanowires, and nanopaintbrushes[J]. Journal of the American Chemical Society, 2002, 124(41): 12288-12293.
[15] Cao C B, Chen Z, An X Q, et al. Growth and field emission properties of cactus-like gallium oxide nanostructures[J]. The Journal of Physical Chemistry C, 2008, 112(1): 95-98.
[16] Shi F, Wei X. Synthesis and characterization of beta-Ga₂O₃ nanorod array clumps by chemical vapor deposition[J]. Journal of Nanoscience and Nanotechnology, 2012, 12(11): 8481-8486.
[17] Kim H W, Kim N H. Formation of amorphous and crystalline gallium oxide nanowires by metalorganic chemical vapor deposition[J]. Applied Surface Science, 2004, 233(1/2/3/4): 294-298.
[18] Oh S, Kim J, Ren F, et al. Quasi-two-dimensional β-gallium oxide solar-blind photodetectors with ultrahigh responsivity[J]. Journal of Materials Chemistry C, 2016, 4(39): 9245-9250.
[19] Rodrigues A V, Sabino N L. Synthesis of photoluminescent β-Ga₂O₃ nanostructures using electrospinning method, and control of length-diameter ratio by calcination heating rates[J]. Journal of Materials Science: Materials in Electronics, 2019, 30(18): 16910-16916.
[20] Bayam Y, Logeeswaran V J, Katzenmeyer A M, et al. Synthesis of Ga₂O₃ nanorods with ultra-sharp tips for high-performance field emission devices[J]. Science of Advanced Materials, 2015, 7(2): 211-218.
[21] Hsieh C H, Chou L J, Lin G R, et al. Nanophotonic switch: gold-in-Ga₂O₃ peapod nanowires[J]. Nano Letters, 2008, 8(10): 3081-3085.
[22] Jiang H F, Chen Y Q, Zhou Q T, et al. Temperature dependence of Ga₂O₃ micro/nanostructures via vapor phase growth[J]. Materials Chemistry and Physics, 2007, 103(1): 14-18.
[23] Chang P C, Fan Z Y, TSENG W Y, et al. Β-Ga₂O₃ nanowires: synthesis, characterization, and p-channel field-effect transistor[J]. Applied Physics Letters, 2005, 87(22): 222102.
[24] Chun H J, Bae S Y, Park J. Controlled structure of gallium oxide and indium oxide nanowires[J]. MRS Proceedings, 2003, 789: N11.27.
[25] 王汐璆,庄文昌,张凯惠,等.化学气相沉积法制备氧化镓纳米线[J].人工晶体学报,2019,48(12):2174-2178+2185.
[26] Reddy L S, Ko Y H, Yu J S. Hydrothermal synthesis and photocatalytic property of β-Ga₂O₃ nanorods[J]. Nanoscale Res Lett, 2015, 10(1): 364.
[27] Zhao Y Y, Frost R L, Yang J, et al. Size and morphology control of gallium oxide hydroxide GaO(OH), nano- to micro-sized particles by soft-chemistry route without surfactant[J]. The Journal of Physical Chemistry C, 2008, 112(10): 3568-3579.
[28] Zhang J H, Jiao S J, Wang D B, et al. Solar-blind ultraviolet photodetection of an α-Ga₂O₃ nanorod array based on photoelectrochemical self-powered detectors with a simple, newly-designed structure[J]. Journal of Materials Chemistry C, 2019, 7(23): 6867-6871.
[29] Kang B K, Lim H D, Mang S R, et al. Synthesis and characterization of monodispersed β-Ga₂O₃ nanospheres via morphology controlled Ga₄(OH)₁₀SO₄ precursors[J]. Langmuir, 2015, 31(2): 833-838.
[30] Kang J, Shin D, Bae S, et al. Graphene transfer: key for applications[J]. Nanoscale, 2012, 4(18): 5527-5537.
[31] Koenig S P, Doganov R A, Seixas L, et al. Electron doping of ultrathin black phosphorus with Cu adatoms[J]. Nano Letters, 2016, 16(4): 2145-2151.
[32] Salvatore G A, Münzenrieder N, Barraud C, et al. Fabrication and transfer of flexible few-layers MoS₂ thin film transistors to any arbitrary substrate[J]. ACS Nano, 2013, 7(10): 8809-8815.
[33] Shin G, Kim H Y, Kim J. Deep-ultraviolet photodetector based on exfoliated n-type β-Ga₂O₃ nanobelt/p-Si substrate heterojunction[J]. Korean Journal of Chemical Engineering, 2018, 35(2): 574-578.
[34] Manasevit H M. Single-crystal gallium arsenide on insulating substrates[J]. Applied Physics Letters, 1968, 12(4): 156-159.
[35] Furneaux R C, Rigby W R, Davidson A P. The formation of controlled-porosity membranes from anodically oxidized aluminium[J]. Nature, 1989, 337(6203): 147-149.
[36] Cheng B, Samulski E T. Fabrication and characterization of nanotubular semiconductor oxides In₂O₃ and Ga₂O₃[J]. Journal of Materials Chemistry, 2001, 11(12): 2901-2902.
[37] Kang B K, Mang S R, Lim H D, et al. Synthesis, morphology and optical properties of pure and Eu³⁺ doped β-Ga₂O₃ hollow nanostructures by hydrothermal method[J]. Materials Chemistry and Physics, 2014, 147(1/2): 178-183.
[38] He H Y, Orlando R, Blanco M A, et al. First-principles study of the structural, electronic, and optical properties of Ga₂O₃ in its monoclinic and hexagonal phases[J]. Physical Review B, 2006, 74(19): 195123.
[39] Pasquevich, Uhrmacher, Ziegeler, et al. Hyperfine interactions of 111Cd in Ga₂O₃[J]. Physical Review. B, Condensed Matter, 1993, 48(14): 10052-10062.
[40] Ueda N, Hosono H, Waseda R, et al. Synthesis and control of conductivity of ultraviolet transmitting β-Ga₂O₃ single crystals[J]. Applied Physics Letters, 1997, 70(26): 3561-3563.
[41] An Y H, Chu X L, Huang Y Q, et al. Au plasmon enhanced high performance β-Ga₂O₃ solar-blind photo-detector[J]. Progress in Natural Science: Materials International, 2016, 26(1): 65-68.
[42] Dong L, Jia R, Xin B, et al. Effects of oxygen vacancies on the structural and optical properties of β-Ga₂O₃[J]. Sci Rep, 2017, 7: 40160.
[43] 郭道友,李培刚,陈政委,等.超宽禁带半导体β-Ga₂O₃及深紫外透明电极、日盲探测器的研究进展[J].物理学报,2019,68(7):7-42.
[44] Koide Y, Liao M Y, Alvarez J. Thermally stable solar-blind diamond UV photodetector[J]. Diamond and Related Materials, 2006, 15(11/12): 1962-1966.
[45] 崔书娟.氧化镓基光电探测器的研制与研究[D].北京:中国科学院大学,2018.
[46] Feng P, Zhang J Y, Li Q H, et al. Individual β-Ga₂O₃ nanowires as solar-blind photodetectors[J]. Applied Physics Letters, 2006, 88(15): 153107.
[47] Tian W, Zhi C Y, Zhai T Y, et al. In-doped Ga₂O₃ nanobelt based photodetector with high sensitivity and wide-range photoresponse[J]. Journal of Materials Chemistry, 2012, 22(34): 17984.
[48] 冯喜宁,赵建伟,秦丽溶,等.基于氧化镓纳米线的日盲紫外探测器件的制备与性能[J].西南大学学报(自然科学版),2014,36(3):167-171.
[49] Chen X, Liu K W, Zhang Z Z, et al. Self-powered solar-blind photodetector with fast response based on Au/β-Ga₂O₃ nanowires array film Schottky junction[J]. ACS Applied Materials & Interfaces, 2016, 8(6): 4185-4191.
[50] You D T, Xu C X, Zhao J, et al. Vertically aligned ZnO/Ga₂O₃ core/shell nanowire arrays as self-driven superior sensitivity solar-blind photodetectors[J]. Journal of Materials Chemistry C, 2019, 7(10): 3056-3063.