热屏下降式单晶炉设计与研究

摘要/Abstract

摘要： 光伏发电以绿色、可再生、能源质量高和不受资源分布地域的限制等优点被广泛使用,单晶硅又以低衰减率和高转换效率等优点渐渐超过了多晶硅光伏电池在市场中的份额,但成本问题和产能问题一直束缚着单晶硅太阳能产业的发展。本文提出了一种在晶体生长过程中随硅液面下降而下降的直拉单晶炉热屏结构,来解决在拉晶过程中坩埚上升所造成的拉晶速度和稳定性降低以及拉晶能耗增加的问题,并以CL120-97单晶炉热场为研究对象,利用有限元仿真对单晶炉优化前后晶体和熔体的热场以及氩气流场进行分析。分析仿真结果表明,优化后单晶炉不仅可以提高单晶炉拉晶的速度和质量,而且还能有效降低单晶炉拉晶的能耗。

关键词: 单晶炉, 单晶硅, 热屏改造, 升降装置, 高效热场, 热场模拟, 流场模拟

Abstract: Photovoltaic power generation has been widely adopted for its advantages such as green, renewable, high energy quality and not restricted by the geographical distribution of resources. Monocrystalline silicon has gradually surpassed the market share of polycrystalline silicon photovoltaic cells with the advantages of low attenuation rate and high conversion efficiency. However, cost issues and productivity issues have been restricting the development of the monocrystalline silicon solar industry. This paper proposes a thermal shield structure of a Czochralski single crystal furnace that drops with the drop of silicon liquid level during crystal growth. To solve the problems of lower crystal pulling speed and stability, as well as the increase of crystal pulling energy consumption caused by the rise of the crucible during the crystal pulling process, taking the CL120-97 single crystal furnace thermal field as the research object, the finite element simulation was used to analyze the flow field of argon gas and the thermal field of the crystal and melt before and after the optimization of the single crystal furnace. The analysis and simulation results show that the optimized single crystal furnace can not only improve the pulling speed and quality of the single crystal, but also effectively reduce the energy consumption of the single crystal furnace.

Key words: single crystal furnace, monocrystalline silicon, heat shield modification, lifting device, high-efficiency thermal field, thermal field simulation, flow field simulation

中图分类号:

张西亚, 高德东, 王珊, 彭鑫, 林光伟, 高俊伟. 热屏下降式单晶炉设计与研究[J]. 人工晶体学报, 2021, 50(6): 987-995.

ZHANG Xiya, GAO Dedong, WANG Shan, PENG Xin, LIN Guangwei, GAO Junwei. Design and Research on Descended Heat Shield of the Single Crystal Furnace[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(6): 987-995.

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