(Ti/ZnO)N成分调制纳米多层膜的结构与透光导电性研究

人工晶体学报 ›› 2021, Vol. 50 ›› Issue (8): 1478-1484.

(Ti/ZnO)_N成分调制纳米多层膜的结构与透光导电性研究

牛犇¹, 吴隽¹, 王凯丰¹, 黄成斌¹, 付豪¹, 祝柏林¹, 李涛涛^1,2, 姚亚刚²

1.武汉科技大学材料与冶金学院,省部共建耐火材料与冶金国家重点实验室,武汉 430081;
2.中国科学院苏州纳米技术与纳米仿生研究所,苏州 215123

收稿日期:2021-04-25 出版日期:2021-08-15 发布日期:2021-09-14
通讯作者: 吴隽,教授。E-mail:woojun@wust.edu.cn
作者简介:牛犇(1995—),男,辽宁省人,硕士研究生。E-mail:1194826059@qq.com
基金资助:
中国科学院苏州纳米技术与仿生研究所纳米器件与应用重点实验室项目(15QT02)

Structure and Transparent Conductive Properties of (Ti/ZnO)_N Compositionally Modulated Nano Multilayer Films

NIU Ben¹, WU Jun¹, WANG Kaifeng¹, HUANG Chengbin¹, FU Hao¹, ZHU Bolin¹, LI Taotao^1,2, YAO Yagang²

1. State Key Laboratory of Refractories and Metallurgy, Faculty of Materials and Metallurgy, Wuhan University of Science and Technology, Wuhan 430081, China;
2. Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, China

Received:2021-04-25 Online:2021-08-15 Published:2021-09-14

摘要/Abstract

摘要： 采用射频(RF)和单极中频直流脉冲磁控溅射方法,在玻璃基板上制备了(Ti/ZnO)_N成分调制纳米多层膜,并研究了调制周期数对其结构及透光导电性能的影响。通过X射线衍射、拉曼光谱、原子力显微镜、紫外可见吸收光谱以及霍尔效应测试结果表明:(Ti/ZnO)_N成分调制纳米多层膜以(002)取向的纤锌矿型ZnO结构为主,具有明确的成分调制结构,各Ti层和各ZnO层厚度均匀连续,各界面平整且无明显扩散。在可见光范围的平均透光率大于85%,电阻率最小可达到2.63×10^-2 Ω·cm。

关键词: 磁控溅射, (Ti/ZnO)_N, 调制周期数, 透光率, 电性能

Abstract: Using radio frequency (RF) and unipolar medium frequency direct-current (DC) pulsed magnetron sputtering methods, (Ti/ZnO)_N compositionally modulated nano multilayer films were prepared on the glass substrate, the effects of number of modulation cycles on the the structure and transparent conductive properties of the films were investigated. The results of X-ray diffraction, Raman spectroscopy, atomic force microscopy, ultraviolet-visible transparent spectroscopy and Hall effect show that the prepared (Ti/ZnO)_N compositionally modulated nano-multilayer films have hexagonal wurtzite structure of ZnO with preferred (002) orientation, and clear compositionally modulated nano-multilayer structure, in which the Ti and ZnO layers are flat, continuous and with uniform thickness, while the interface is clean and without diffusion. The average optical transmittance in the visible range is higher than 85% while the minimum resistivity is at about 2.63×10^-2 Ω·cm.

Key words: magnetron sputtering, (Ti/ZnO)_N, number of modulation cycle, light transmittance, electrical property

中图分类号:

TB383.2

牛犇, 吴隽, 王凯丰, 黄成斌, 付豪, 祝柏林, 李涛涛, 姚亚刚. (Ti/ZnO)_N成分调制纳米多层膜的结构与透光导电性研究[J]. 人工晶体学报, 2021, 50(8): 1478-1484.

NIU Ben, WU Jun, WANG Kaifeng, HUANG Chengbin, FU Hao, ZHU Bolin, LI Taotao, YAO Yagang. Structure and Transparent Conductive Properties of (Ti/ZnO)_N Compositionally Modulated Nano Multilayer Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(8): 1478-1484.

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