反应磁控溅射制备h-BN薄膜及其日盲紫外探测器

摘要/Abstract

摘要： 随着电子信息技术的飞速发展,具有更高抗干扰能力以及更高灵敏度的日盲紫外探测器引起了广泛关注。六方相氮化硼(h-BN)凭借其超宽带隙、高光吸收系数、高热导率及高击穿场强等优势成为日盲紫外探测器研究的热点材料。此外,h-BN良好的机械强度和光学透明性使其兼具柔性探测器的潜力。然而室温条件下制备的h-BN薄膜常具有较多缺陷,极大程度上限制了其柔性探测器的发展。本文在室温条件下采用反应磁控溅射,以B为生长源,在蓝宝石和Si衬底上实现了较高质量h-BN薄膜的制备,并在此薄膜的基础上制备了高性能日盲紫外探测器。3 V电压下,其探测器拥有极低的暗电流(0.07 pA)、较高的响应度(1.37 μA/W)和探测率(2.73×10¹⁰ Jones)。本文的研究结果证实了室温制备h-BN薄膜及其日盲紫外探测器的可行性,为实现可在室温下工作的h-BN探测器的应用提供了参考。

关键词: h-BN薄膜, 反应溅射法, 室温, 日盲紫外探测器, 光电性能, 响应度

Abstract: Nowadays, with the rapid development of electronic information technology, solar-blind ultraviolet (UV) detectors having large anti-interference ability and higher sensitivity are attracting much attention. Possessing ultra-wide band gap, high optical absorption coefficient, good thermal conductivity, and high breakdown field strength, hexagonal boron nitride (h-BN) has become a promising material for solar-blind UV detectors. Additionally, high mechanical strength and optical transparency of h-BN make it a potential candidate for flexible detector. However, the h-BN films prepared at low temperatures often contain many defects, which greatly limit their performance as a detector. In this work, high-quality h-BN films were prepared on sapphire and Si substrates using B as growth source at room temperature by reactive magnetron sputtering method, and then a high-performance solar-blind UV detector was fabricated based on h-BN films. The prepared h-BN solar-blind UV detector has extremely low dark current (0.07 pA), high responsivity (1.37 μA/W) and detectivity (2.73×10¹⁰ Jones) at 3 V. These results indicate that preparation of high-quality h-BN film and its solar-blind UV detector at room temperature are feasible. The study also provides a reference for the application of h-BN detector working at room temperature.

Key words: h-BN film, reactive sputtering method, room temperature, solar-blind ultraviolet detector, photoelectric property, responsivity

中图分类号:

武成, 朱昭捷, 李坚富, 涂朝阳, 吕佩文, 王燕. 反应磁控溅射制备h-BN薄膜及其日盲紫外探测器[J]. 人工晶体学报, 2023, 52(5): 798-804.

WU Cheng, ZHU Zhaojie, LI Jianfu, TU Chaoyang, LYU Peiwen, WANG Yan. Fabrication of h-BN Films by Reactive Sputtering Method for Solar-Blind Ultraviolet Detectors[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(5): 798-804.

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