ITO/AgNWs/ITO薄膜的制备及其性能研究

人工晶体学报 ›› 2024, Vol. 53 ›› Issue (7): 1150-1159.

ITO/AgNWs/ITO薄膜的制备及其性能研究

杨涛¹, 陈彩明¹, 黄瑜佳², 吴少平², 徐华蕊¹, 汪坤喆¹, 朱归胜¹

1.桂林电子科技大学材料科学与工程学院,电子信息材料与器件教育部工程研究中心,广西信息材料重点实验室,桂林 541004;
2.广西中沛光电科技有限公司,来宾 546100

收稿日期:2024-03-25 出版日期:2024-07-15 发布日期:2024-07-23
通信作者: 朱归胜,教授。E-mail:zhuguisheng@guet.edu.cn
作者简介:杨涛(1998—),男,湖南省人,硕士研究生。E-mail:343710130@qq.com
基金资助:
国家自然科学基金(62364007,U21A2065);广西科技计划(桂科AA21077018,桂科AD23023013,桂科AB23075218);桂林市科学研究与技术开发计划(20220120-1);电子信息材料与器件教育部工程研究中心重点基金(EIMD-AA202001)

Preparation and Properties of ITO/AgNWs/ITO Films

YANG Tao¹, CHEN Caiming¹, HUANG Yujia², WU Shaoping², XU Huarui¹, WANG Kunzhe¹, ZHU Guisheng¹

1. Guangxi Key Laboratory of Information Materials, Engineering Research Center of Electronic Information Materials and Devices, Ministry of Education, School of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China;
2. Guangxi Zhongpei optoelectronic Technology Co., Ltd., Laibin 546100, China

Received:2024-03-25 Online:2024-07-15 Published:2024-07-23

摘要/Abstract

摘要： 随着显示面板向超大尺寸、超高清、可触控的方向发展,单一的氧化铟锡(ITO)薄膜难以满足显示器件越来越高的光电性能要求,因此复合导电薄膜得以发展。本文制备了以二维银纳米线(AgNWs)导电网络嵌入ITO薄膜形成的ITO(222)/AgNWs/ITO(400)复合薄膜结构,系统研究了AgNWs添加量和上层ITO薄膜溅射温度对复合薄膜结构与光电性能的影响,AgNWs金属导电网络不仅提升了薄膜的电学性能,还保持了优良的光学性能。结果表明,在旋涂600 μL的AgNWs分散液、上层ITO薄膜的溅射温度为175 ℃时,制备的复合ITO薄膜方阻为7.13 Ω/□,在550 nm处透过率为91.52%,且品质因数为57.82×10^-3 Ω^-1,实现了超低电阻率和高可见光透过率复合ITO薄膜的制备。

关键词: ITO薄膜, 磁控溅射, AgNWs, 导电网络, 复合薄膜, 光电性能, 溅射温度

Abstract: With the advancement of display panel technology towards ultra-large size, ultra-high-definition and touch control capability, the traditional single indium tin oxide (ITO) film alone struggles to meet the increasingly demanding photoelectric performance requirements of display devices. Consequently, composite conductive films have been developed. This study fabricated an ITO(222)/AgNWs/ITO(400) composite film structure by embedding a two-dimensional silver nanowires (AgNWs) conductive networks into ITO films. The influences of the AgNWs addition and the sputtering temperature of the upper ITO film on the structural and optoelectronic properties of the composite film were systematically investigated. The AgNWs metal conductive networks not only enhance the electrical properties of the composite films but also maintain excellent optical characteristics. The results demonstrate that with a spin-coating of 600 μL AgNWs dispersion and a sputtering temperature of 175 ℃ for the upper ITO film, the fabricated composite ITO film has a sheet resistance of 7.13 Ω/□, an impressive transmittance of 91.52% at 550 nm, and a figure of merit of 57.82×10^-3 Ω^-1, achieving the preparation of a composite ITO film with ultra-low resistivity and high visible light transmittance.

Key words: ITO film, magnetron sputtering, AgNWs, conductive network, composite film, photoelectric property, sputtering temperature

中图分类号:

O78
O484

杨涛, 陈彩明, 黄瑜佳, 吴少平, 徐华蕊, 汪坤喆, 朱归胜. ITO/AgNWs/ITO薄膜的制备及其性能研究[J]. 人工晶体学报, 2024, 53(7): 1150-1159.

YANG Tao, CHEN Caiming, HUANG Yujia, WU Shaoping, XU Huarui, WANG Kunzhe, ZHU Guisheng. Preparation and Properties of ITO/AgNWs/ITO Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(7): 1150-1159.

参考文献

[1] JOO S Y, LOKA C, JO Y W, et al. ITO/SiO₂/ITO structure on a sapphire substrate using the oxidation of ultra-thin Si films as an insulating layer for one-glass-solution capacitive touch-screen panels[J]. Coatings, 2020, 10(2): 134.
[2] CHAVAN G T, KIM Y, KHOKHAR M Q, et al. A brief review of transparent conducting oxides (TCO): the influence of different deposition techniques on the efficiency of solar cells[J]. Nanomaterials, 2023, 13(7): 1226.
[3] AYDıN E B, SEZGINTÜRK M K. Indium tin oxide (ITO): a promising material in biosensing technology[J]. TrAC Trends in Analytical Chemistry, 2017, 97: 309-315.
[4] LEE S J, LEE S H, KANG H W, et al. Flexible electrochromic and thermochromic hybrid smart window based on a highly durable ITO/graphene transparent electrode[J]. Chemical Engineering Journal, 2021, 416: 129028.
[5] HSIEH S H, CHEN W J, OHDAIRA K. Barrier performance of ITO film on textured Si substrate[J]. Journal of Materials Science: Materials in Electronics, 2020, 31(16): 13808-13816.
[6] QIN L H, YAN Y Q, YU G, et al. Research progress of transparent electrode materials with sandwich structure[J]. Materials, 2021, 14(15): 4097.
[7] WU M Y, ZHENG H R, LI X P, et al. Highly transparent low resistance ATO/AgNWs/ATO flexible transparent conductive thin films[J]. Ceramics International, 2020, 46(4): 4344-4350.
[8] SHIN Y, KIM J. Influences of the Ag and the ITO thicknesses on the optical and the electrical properties of ITO/Ag/ITO multilayer films[J]. Journal of the Korean Physical Society, 2019, 74(9): 871-875.
[9] WANG H L, TANG C M, SHI Q, et al. Influence of Ag incorporation on the structural, optical and electrical properties of ITO/Ag/ITO multilayers for inorganic all-solid-state electrochromic devices[J]. Ceramics International, 2021, 47(6): 7666-7673.
[10] KUMAR A, KUMAR M, GOYAT M S, et al. A review of the latest developments in the production and applications of Ag-nanowires as transparent electrodes[J]. Materials Today Communications, 2022, 33: 104433.
[11] ZHANG L, SONG T T, SHI L X, et al. Recent progress for silver nanowires conducting film for flexible electronics[J]. Journal of Nanostructure in Chemistry, 2021, 11(3): 323-341.
[12] PATIL J J, CHAE W H, TREBACH A, et al. Failing forward: stability of transparent electrodes based on metal nanowire networks[J]. Advanced Materials, 2021, 33(5): 2004356.
[13] SHIN K Y, KIM S, KEUM M J, et al. Properties of ITO-stacked AgNWs films prepared on flexible substrates by low damage sputtering[J]. Molecular Crystals and Liquid Crystals, 2018, 663(1): 47-54.
[14] CHOI K H, KIM J, NOH Y J, et al. Ag nanowire-embedded ITO films as a near-infrared transparent and flexible anode for flexible organic solar cells[J]. Solar Energy Materials and Solar Cells, 2013, 110: 147-153.
[15] LIN K M, LIN R L, HSIAO W T, et al. Effects of silver nanowire concentration and annealing temperature on the optoelectronic properties of hybrid transparent electrodes[J]. Journal of Materials Science: Materials in Electronics, 2017, 28(7): 5144-5153.
[16] KIM C L, LEE J Y, SHIN D G, et al. Mechanism of heat-induced fusion of silver nanowires[J]. Scientific Reports, 2020, 10: 9271.
[17] DONG L, CHEN Y D, ZHU G S, et al. Highly (400) preferential ITO thin film prepared by DC sputtering with excellent conductivity and infrared reflectivity[J]. Materials Letters, 2020, 260: 126735.
[18] ZHANG P, WYMAN I, HU J W, et al. Silver nanowires: synthesis technologies, growth mechanism and multifunctional applications[J]. Materials Science and Engineering: B, 2017, 223: 1-23.
[19] XIONG J Q, LI S H, CIOU J H, et al. A tailorable spray-assembly strategy of silver nanowires-bundle mesh for transferable high-performance transparent conductor[J]. Advanced Functional Materials, 2021, 31(1): 2006120.
[20] BI R, ZHENG C T, YU W W, et al. Breaking through the plasma wavelength barrier to extend the transparency range of ultrathin indium tin oxide films into the far infrared[J]. Journal of Applied Physics, 2023, 134(16): 165301.
[21] JIAO P W, LI S J, ZHU G S, et al. Effect of in layer thickness on the photoelectric properties of indium tin oxide (ITO)/In/ITO multilayer films[J]. Thin Solid Films, 2024, 789: 140172.
[22] HWANG B, SEOL J G, AN C H, et al. Bending fatigue behavior of silver nanowire networks with different densities[J]. Thin Solid Films, 2017, 625: 1-5.
[23] DJEFFAL F, FERHATI H, BENHAYA A, et al. Effects of annealing temperature and ITO intermediate thin-layer on electrical proprieties of Au/p-Si structure deposited by RF magnetron sputtering[J]. Superlattices and Microstructures, 2019, 128: 382-391.
[24] DONG L, ZHU G S, XU H R, et al. Fabrication of nanopillar crystalline ITO thin films with high transmittance and IR reflectance by RF magnetron sputtering[J]. Materials, 2019, 12(6): 958.
[25] AZANI M R, HASSANPOUR A, TORRES T. Benefits, problems, and solutions of silver nanowire transparent conductive electrodes in indium tin oxide (ITO)-free flexible solar cells[J]. Advanced Energy Materials, 2020, 10(48): 2002536.
[26] WANG K Z, JIAO P W, CHENG Y Y, et al. ITO films with different preferred orientations prepared by DC magnetron sputtering[J]. Optical Materials, 2022, 134: 113040.
[27] KIM K, CHO E S, KWON S J. Analyses of the light extraction efficiency of organic light-emitting diodes with ITO/mesh-Ag/ITO anode and its optical transmittance as transparent electrode[J]. Japanese Journal of Applied Physics, 2021, 60(12): 122007.
[28] UYANIK Z, TURKOGLU F, KOSEOGLU H, et al. Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing[J]. Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures, 2022, 40(4): 042204.
[29] LEI P, CHEN X T, YAN Y, et al. Sputtered ITO/Ag/ITO films: growth windows and Ag/ITO interfacial properties[J]. Journal of Electronic Materials, 2022, 51(5): 2645-2651.
[30] CHENG Y T, LU T L, HONG M H, et al. Evaluation of transparent ITO/nano-Ag/ITO electrode grown on flexible electrochromic devices by roll-to-roll sputtering technology[J]. Coatings, 2022, 12(4): 455.
[31] LEE S, KIM M J, LEE S H, et al. Boosting coloration efficiency in an electrochromic device using an ITO/Ag/ITO multilayered electrode and porous WO₃ chromic layer[J]. Journal of Information Display, 2023, 24(3): 177-188.
[32] RAJENDRAN M, LIN K M, HSIAO W T. Optoelectronic and structural properties of ITO/Ag/ITO transparent electrodes using ultraviolet laser annealing[J]. Modern Physics Letters B, 2023, 37(19): 2340036.