RIG型磁光薄膜的研究进展及应用

摘要/Abstract

摘要： 随着光通信技术与光子集成电路的发展,非互易性器件作为光通信系统中重要的组成部分得到了越来越广泛的研究与应用。基于磁光效应制成的磁光隔离器和环行器是目前应用最为广泛的非互易性器件,为了将非互易性器件整块集成在硅片上,需制备性能与块状磁光材料相当的磁光薄膜。在近红外通信波段(1 550 nm),以钇铁石榴石(Y₃Fe₅O₁₂,YIG)为代表的稀土铁石榴石(RIG)具备优良的磁光效应,是最具应用前景的磁光材料之一。研究发现,使用稀土离子对YIG薄膜进行掺杂可以有效改善其磁光性能,尤其是Bi³⁺和Ce³⁺掺杂的YIG表现出巨法拉第效应。本文首先介绍了法拉第效应原理,介绍了三种常见磁光薄膜的生长方法,回顾了近年来的主要研究成果,介绍了磁光薄膜在光隔离器和环行器中的应用,最后对磁光薄膜的未来发展趋势进行了展望。

关键词: 磁光薄膜, 稀土铁石榴石, 钇铁石榴石, 脉冲激光沉积, 液相外延, 射频磁控溅射, 磁光隔离器, 法拉第效应

Abstract: With the development of optical communication technology and photonic integrated circuits, non-reciprocal devices have been widely studied and applied as an important part of optical communication systems. Magneto-optical isolators and circulators based on magneto-optical effect are currently the most widely used non-reciprocal devices. In order to integrate non-reciprocal devices into silicon wafers, magneto-optical thin films with comparable performance to bulk magneto-optical materials need to be prepared. In the near-infrared band (1 550 nm), rare earth iron garnet (RIG) represented by yttrium iron garnets (Y₃Fe₅O₁₂, YIG) has excellent magneto-optical effects and become one of the most promising magneto-optical materials. It is found that doping with rare earth ions can effectively improve the magneto-optical properties of YIG thin films, especially Bi³⁺ and Ce³⁺ doped YIG exhibit giant Faraday effect. In this paper, the Faraday effect principle is briefly introduced, three common growth methods of RIG magneto-optical thin films and their research progress in recent years are reviewed, and the application of RIG magneto-optical thin films in optical isolators and circulators are summarized. Finally, the future development trend of magneto-optical films is prospected.

Key words: magneto-optical thin film, rare earth iron garnet, yttrium iron garnet, pulsed laser deposition, liquid phase epitaxy, radio frequency magnetron sputtering, magneto-optical isolator, Faraday effect

中图分类号:

O734

朱森寅, 张晗旭, 王先杰, 黄湛钧, 宋波. RIG型磁光薄膜的研究进展及应用[J]. 人工晶体学报, 2022, 51(9-10): 1659-1672.

ZHU Senyin, ZHANG Hanxu, WANG Xianjie, HUANG Zhanjun, SONG Bo. Research Progress and Application of Magneto-Optical Thin Films Based on RIG[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(9-10): 1659-1672.

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