Properties of Infrared-Visible Compatible Stealth Films Based on ITO/Al/ITO Structures

doi:10.16553/j.cnki.issn1000-985x.2025.0041

Abstract

Abstract: Infrared-visible compatible stealth materials have attracted much attention for breaking through the limitation of single-band stealth materials and being able to cope with multi-band reconnaissance technology. In this paper， ITO/Al/ITO composite films with different thicknesses of Al spacer layers were prepared by DC magnetron sputtering. Through the synergistic effect of optical effects such as surface and interface effects and multi-band optical coupling among multiple film layers， a kind of ITO/Al/ITO composite film with high visible light transmission and high infrared reflection is obtained. XRD characterization results show that， the insertion of the Al layer improves the crystallinity of the ITO film， the good crystal structure contributes to the movement of carriers， and the carrier mobility of the composite film is enhanced to 24.2 cm²·V^-1·s^-1 compared with that of the bilayer ITO film， which has a carrier mobility of 11.1 cm²·V^-1·s^-1. The visible light transmittance and infrared light reflectance of the composite films with Al layer sputtering time of 9 and 12 s are both greater than 80%.

Key words: ITO/Al/ITO composite film; magnetron sputtering; infrared-visible compatible stealth; high transmittance; carrier mobility

CLC Number:

GU Dong, DONG Ling, YANG Jiwei, LI Haiping, LI Jie, ZHU Guisheng, XU Huarui. Properties of Infrared-Visible Compatible Stealth Films Based on ITO/Al/ITO Structures[J]. Journal of Synthetic Crystals, 2025, 54(9): 1607-1613.

Figures/Tables 4

Fig.1 Structural properties of composite thin films prepared with different Al sputtering time

Fig.2 Cross-sectional and surface SEM images of the composite structured films prepared with different Al sputtering time

Fig.3 SEM images of the surface of ITO/Al/ITO composite structure films with different Al sputtering time

Fig.4 Optoelectronic properties of composite structured films prepared with different Al sputtering time

References 34

[1]	AHMAD H， TARIQ A， SHEHZAD A， et al. Stealth technology： methods and composite materials： a review［J］. Polymer Composites， 2019， 40（12）： 4457-4472.
[2]	YENILMEZ F， MUTLU I. Production of metamaterial-based radar absorbing material for stealth technology［J］. Brazilian Journal of Physics， 2024， 54（2）： 60.
[3]	ZHAO Y， JI G B. Multi-spectrum bands compatibility： new trends in stealth materials research［J］. Science China Materials， 2022， 65（11）： 2936-2941.
[4]	CHAI X， ZHU D M， LIU Y， et al. Silver-modified chromium（Ⅲ） oxide as multi-band compatible stealth materials for visual/infrared stealth and radar wave transmission［J］. Composites Science and Technology， 2021， 216： 109038.
[5]	XU T T， AN Z M， ZHANG R B. Novel ceramic matrix metastructure for high-temperature radar-infrared compatible stealth： structure-function design and manufacture［J］. Composites Part A： Applied Science and Manufacturing， 2024， 179： 108030.
[6]	YU D M， WANG X Z， MA Y G， et al. Dual-dielectric Fabry-Perot film for visible-infrared compatible stealth and radiative heat dissipation［J］. Optics Communications， 2025， 574： 131173.
[7]	ZHANG B Z， ZHAO L， WANG J Y， et al. A broadband multifunctional switchable metamaterial for radar-infrared compatible stealth［J］. Optics & Laser Technology， 2025， 183： 112282.
[8]	刘　凯. 色度与红外低发射率性能兼容涂层制备及性能研究［D］. 南京：南京航空航天大学， 2016.
	LIU K. Research on the preparation and performance of coatings with compatible chromaticity and low infrared emissivity［D］. Nanjing： Nanjing University of Aeronautics and Astronautics， 2016 （in Chinese）.
[9]	WANG K Z， WANG C X， YIN Y J， et al. Modification of Al pigment with graphene for infrared/visual stealth compatible fabric coating［J］. Journal of Alloys and Compounds， 2017， 690： 741-748.
[10]	ZHANG M， LI M， YAN Z K， et al. Multifunctional Ag-ZrB₂ composite film with low infrared emissivity， low visible light reflectance and hydrophobicity［J］. Applied Surface Science， 2022， 604： 154626.
[11]	MENG Z， TIAN C H， XU C L， et al. Multi-spectral functional metasurface simultaneously with visible transparency， low infrared emissivity and wideband microwave absorption［J］. Infrared Physics & Technology， 2020， 110： 103469.
[12]	LIU B， WU P H， ZHU H Y， et al. Ultra narrow dual-band perfect absorber based on a dielectric-dielectric-metal three-layer film material［J］. Micromachines， 2021， 12（12）： 1552.
[13]	DING Y H， DU C L， LEI M X， et al. Optimization of highly transparent DMD-films for application in perovskite solar cell［J］. Physica Scripta， 2024， 99（8）： 085529.
[14]	MIZUKOSHI K， YAMAMURA T， TOMIOKA Y， et al. Effect of TiO₂ lowermost layer on crystal orientation and electrical resistivity of glass/TiO₂/ZnO/Ag structure in Low-E glass［J］. Japanese Journal of Applied Physics， 2021， 60（2）： 025501.
[15]	ZARNEH Z H， KADIVAR E. A comparison of physical properties of dielectric/metal/dielectric film on polyethylene terephthalate and optical glass substrates［J］. Materialwissenschaft und Werkstofftechnik， 2024， 55（3）： 384-391.
[16]	KIM J， PARK C， HAHN J W. Metal-semiconductor-metal metasurface for multiband infrared stealth technology using camouflage color pattern in visible range［J］. Advanced Optical Materials， 2022， 10（6）： 2101930.
[17]	LIU X J， CAI X， QIAO 1， et al. The design of ZnS/Ag/ZnS transparent conductive multilayer films［J］. Thin Solid Films， 2003， 441（1/2）： 200-206.
[18]	WANG L， WANG W H， WANG L Y， et al. Flexible and transparent visible-infrared-compatible stealth film based on ITO/Ag/ITO configuration［J］. Journal of Optics， 2024， 53（4）： 3947-3955.
[19]	DONG L， ZHU G S， XU H R， et al. Fabrication of nanopillar crystalline ITO thin films with high transmittance and IR reflectance by RF magnetron sputtering［J］. Materials， 2019， 12（6）： 958.
[20]	XU Z C， WANG D， ZHONG M F， et al. Preparation and characterization of Mg²⁺-doped CaCu₃Ti₄O₁₂ pigment with high NIR reflectance［J］. Ceramics International， 2020， 46（16）： 25306-25312.
[21]	LIU H， XING H L， SHI R， et al. Facial synthesis of Al@MnO₂ with enhanced microwave absorption and low infrared emissivity［J］. Journal of Materials Science： Materials in Electronics， 2020， 31（21）： 18791-18802.
[22]	SHI M Y， XU C， YANG Z H， et al. Achieving good infrared-radar compatible stealth property on metamaterial-based absorber by controlling the floating rate of Al type infrared coating［J］. Journal of Alloys and Compounds， 2018， 764： 314-322.
[23]	杨　涛，陈彩明，黄瑜佳，等. ITO/AgNWs/ITO薄膜的制备及其性能研究［J］. 人工晶体学报， 2024， 53（7）： 1150-1159.
	YANG T， CHEN C M， HUANG Y J， et al. Preparation and properties of ITO/AgNWs/ITO films［J］. Journal of Synthetic Crystals， 2024， 53（7）： 1150-1159 （in Chinese）.
[24]	SANKOWSKA I， DOMAGALA J Z， YEFANOV O M， et al. Non-periodicity of peak-to-peak distances in X-ray diffraction spectrums from perfect superlattices［J］. Journal of Applied Physics， 2013， 113（6）： 064302.
[25]	WANG K Z， JIAO P W， CHENG Y Y， et al. ITO films with different preferred orientations prepared by DC magnetron sputtering［J］. Optical Materials， 2022， 134： 113040.
[26]	DONG L， CHEN Y D， ZHU G S， et al. Highly （400） preferential ITO thin film prepared by DC sputtering with excellent conductivity and infrared reflectivity［J］. Materials Letters， 2020， 260： 126735.
[27]	JIAO P W， LI S J， ZHU G S， et al. Effect of in layer thickness on the photoelectric properties of indium tin oxide （ITO）/In/ITO multilayer films［J］. Thin Solid Films， 2024， 789： 140172.
[28]	GUILLÉN C， MONTERO J， HERRERO J. ITO/ATO bilayer transparent electrodes with enhanced light scattering， thermal stability and electrical conductance［J］. Applied Surface Science， 2016， 384： 45-50.
[29]	沈　月，余登德，王书明，等. 磁控溅射沉积钌薄膜的微观结构及生长过程［J］. 贵金属， 2020， 41（3）： 44-52.
	SHEN Y， YU D D， WANG S M， et al. Microstructure and growth of ruthenium films deposited by magnetron sputtering［J］. Precious Metals， 2020， 41（3）： 44-52 （in Chinese）.
[30]	BULÍŘ J， ZIKMUND T， NOVOTNÝ M， et al. Photoluminescence excitation of lithium fluoride films by surface plasmon resonance in Kretschmann configuration［J］. Applied Physics A， 2016， 122（4）： 412.
[31]	HUANG L， LIU H M， JIANG T， et al. Metal-semiconductor-metal structure enhanced quantum dot infrared photodetector for near-infrared［J］. Plasmonics， 2024， 19（5）： 2653-2661.
[32]	HAN H， THEODORE N D， ALFORD T L. Improved conductivity and mechanism of carrier transport in zinc oxide with embedded silver layer［J］. Journal of Applied Physics， 2008， 103（1）： 013708.
[33]	KIM J H， LEE J H， HEO Y W， et al. Effects of oxygen partial pressure on the preferential orientation and surface morphology of ITO films grown by RF magnetron sputtering［J］. Journal of Electroceramics， 2009， 23（2）： 169-174.
[34]	FANG X， MAK C L， DAI J Y， et al. ITO/Au/ITO sandwich structure for near-infrared plasmonics［J］. ACS Applied Materials & Interfaces， 2014， 6（18）： 15743-15752.