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JOURNAL OF SYNTHETIC CRYSTALS ›› 2007, Vol. 36 ›› Issue (4): 828-831.
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RAN Yi;LAN Tian-shi;QIN Pan;DAI Xiao-yan;YIN Yong-xiang
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RSSOnline:2007-08-15
Published:2021-01-20
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RAN Yi;LAN Tian-shi;QIN Pan;DAI Xiao-yan;YIN Yong-xiang. Silicon Tetrachloride Direct Reduction to Polysilicon in the Plasma System[J]. Journal of Synthetic Crystals, 2007, 36(4): 828-831.
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