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JOURNAL OF SYNTHETIC CRYSTALS ›› 2008, Vol. 37 ›› Issue (1): 70-75.

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Study of the Deposition of HfO2 Thin Films by Reactive Magnetron Sputtering Process

HE Qi;WANG Hong-bin;ZHANG Shu-yu;LU Fan-xiu;YANG Hai;SU Xiao-ping   

  • Online:2008-02-15 Published:2021-01-20

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