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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (2): 359-364.
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ZHANG Yin-xia;LI Da-lei;GAO Wei;KANG Ren-ke
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RSSOnline:2011-04-15
Published:2021-01-20
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ZHANG Yin-xia;LI Da-lei;GAO Wei;KANG Ren-ke. Experimental Investigation on the Detection Technique for Surface Layer Damage of Machined Silicon Wafers[J]. Journal of Synthetic Crystals, 2011, 40(2): 359-364.
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