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JOURNAL OF SYNTHETIC CRYSTALS ›› 2012, Vol. 41 ›› Issue (4): 942-949.
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ZHANG Pan;WANG Wei-wen;CHEN Guang-hui;LI Jian-long
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RSSOnline:2012-08-15
Published:2021-01-20
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ZHANG Pan;WANG Wei-wen;CHEN Guang-hui;LI Jian-long. Simulation of Polycrystalline Silicon Chemical Vapor Deposition in Fluidized Bed[J]. Journal of Synthetic Crystals, 2012, 41(4): 942-949.
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