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JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (5): 811-814.

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Analysis of φ300 mm Cz Silicon Single Crystal Growth with Constant Growth Rate

GAO Yu;ZHU Liang;ZHANG Jun;LOU Zhongshi   

  • Online:2020-05-15 Published:2021-01-20

CLC Number: