Research Progress of Ultra-Wide Band Gap Semiconductor Ga2O3-Based X-Ray Detectors
LI Zhiwei, TANG Huili, XU Jun, LIU Bo
2022, 51(3):
523-537.
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X-ray with its advantages of short wavelength and strong penetration plays an important role in medical imaging, security inspection, scientific research, space communication, and other fields. Semiconductor X-ray detectors can convert X-ray photons into current signals, which have the advantages of easy integration, high spatial resolution, high energy resolution, and fast response speed. High-performance X-ray detectors should have the features of low dark current, high sensitivity, fast response speed, and stable work for a long time. Therefore, the semiconductor materials for preparing X-ray detectors should have the characteristics of high resistivity, few defects, and strong irradiation resistance. Gallium oxide (Ga2O3) is one of the new wide band gap semiconductor materials, which has the advantages of ultra-wide band gap, high breakdown field strength, high X-ray absorption coefficient, high thermal stability, and being grown by melting methods. Therefore, Ga2O3 is suitable for preparing X-ray detectors. In recent years, X-ray detectors based on Ga2O3 have become one of the research hotspots. In this review, the physical properties of Ga2O3 semiconductor and its research progress in X-ray detectors are introduced, the influence mechanism of materials and device structure on the performance of X-ray detectors are analyzed, the ideas for the preparation of Ga2O3-based X-ray detectors with high performance are provided.