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人工晶体学报 ›› 2008, Vol. 37 ›› Issue (5): 1073-1078.

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不同磁场对大直径单晶硅生长中的动量与热量输运影响的数值分析

宇慧平;隋允康;安国平   

  1. 北京工业大学机电学院工程数值模拟中心,北京,100022
  • 出版日期:2008-10-15 发布日期:2021-01-20
  • 基金资助:
    Fund of Beijing Municipal Education Commission(KM200710005032)

Analysis of Various Magnetic Fields Effects on the Transport of Momentum, Heat in a Large Silicon Crystal Growth

YU Hui-ping;SUI Yun-kang;AN Guo-ping   

  • Online:2008-10-15 Published:2021-01-20

摘要: 本文采用紊流模型对大直径单晶硅在垂直磁场及勾形磁场作用时熔体内动量及热量输运作了数值模拟.采用有限体积法离散控制方程,采用SIMPLE((Semi-implicit Method for Pressure Linked Equations)算法耦合压力和速度场.对无磁场、垂直磁场及勾形磁场作用下熔体内的传输特性进行了比较.数值计算结果表明,垂直磁场对动量及热量的分布具有双重效应.垂直磁场强度过大,不利于晶体生长.随着勾形磁场强度的增加,熔体内子午面上的流动减弱,并且紊流强度也相应降低.

关键词: 提拉法;单晶硅;磁场;紊流模型

Abstract: Numerical simulations were carried out to analyze the effects of various magnetic fields on thetransport of momentum and heat in Czochralski growth process. The stationary vertical and cusp magneticfields were applied in this study. The governing equations were numerically solved using a finite volumemethod with SIMPLE(semi-implicit method for pressure linked equations) method to couple the velocityand pressure. A low-Reynolds number k-ε model was used for the description of the turbulent processes.The transport characteristics under the vertical and cusp magnetic fields were compared. Verticalmagnetic field has dual effects on the transport of momentum, heat. Numerical results show that very largevertical magnetic field is harm to the quality of crystal rod; with the increase of the strength of cuspmagnetic field, the melt flow at the meridional plane, turbulent intensities, heat transfer are reducedgradually.

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