溅射羽辉与基底夹角对掺氧二硫化钼薄膜光学性质的影响

人工晶体学报 ›› 2022, Vol. 51 ›› Issue (11): 1871-1877.

溅射羽辉与基底夹角对掺氧二硫化钼薄膜光学性质的影响

赵子楠¹, 武金涛¹, 梁智健¹, 朱亚彬¹, 刘歌², 陈云琳²

1.北京交通大学物理科学与工程学院,物理系,北京 100044;
2.北京交通大学物理科学与工程学院,微纳材料及应用研究所,北京 100044

收稿日期:2022-06-29 出版日期:2022-11-15 发布日期:2022-12-07
通讯作者: 朱亚彬,博士,副教授。E-mail:ybzhu@bjtu.edu.cn；陈云琳,博士,教授。E-mail:ylchen@bjtu.edu.cn
作者简介:赵子楠(2001—),女,河北省人。E-mail:19271143@bjtu.edu.cn
基金资助:
国家大学生创新训练计划(2101700066)

Effect of Sputtering Plume and Substrate Angle on the Optical Properties of Oxygen-Doped Molybdenum Disulfide Film

ZHAO Zinan¹, WU Jintao¹, LIANG Zhijian¹, ZHU Yabin¹, LIU Ge², CHEN Yunlin²

1. Department of Physics, School of Physical Science and Engineering, Beijing Jiaotong University, Beijing 100044, China;
2. Institute of Applied Micro-Nano Materials, School of Physical Science and Engineering, Beijing Jiaotong University, Beijing 100044, China

Received:2022-06-29 Online:2022-11-15 Published:2022-12-07

摘要/Abstract

摘要： 二硫化钼(MoS₂)在环境中的热稳定性和化学稳定性好,迁移率相对较高,已应用于气体传感器、光电探测器和场效应管等器件的研制。采用氧气辅助技术生长的氧掺杂MoS₂(MoS_2-xO_x)不仅可以调控MoS₂单晶尺寸,还能提高MoS₂单晶光致发光强度。本文采用射频反应磁控溅射技术、自然环境中氧化和热退火工艺,改变溅射羽辉与玻璃基底夹角来制备MoS_2-xO_x薄膜并研究其光学性质。采用X射线光电子能谱分析了样品的元素和价态;扫描电子显微镜观测的结果表明,溅射羽辉与基底成45°(θ=45°)时表面形貌为最优;紫外-可见分光光度计的测试结果表明,随着厚度和氧含量的增加,MoS_2-xO_x薄膜的光学带隙减小;采用COMSOL Multiphysics软件模拟了MoS_2-xO_x薄膜光学透过率,理论和实验结果相吻合。本文的研究结果将为MoS_2-xO_x薄膜在光学领域的应用提供科学参考。

关键词: 掺氧二硫化钼, 氧气辅助技术, 磁控溅射, 羽辉, 透过率, 光学带隙, COMSOL

Abstract: Molybdenum disulfide (MoS₂) has good thermal and chemical stability and relatively high mobility in the environment. It has been used in the applications of gas sensors, photodetectors and field effect transistors. Oxygen-doped molybdenum disulfide (MoS_2-xO_x) generated by oxygen-assisted technology can not only regulate the size of MoS₂ single crystal, but also improve the photoluminescence intensity of MoS₂ single crystal. MoS_2-xO_x films were prepared and their optical properties were investigated in this paper. First, radio frequency reactive magnetron sputtering technology was used to prepare the precursors of MoS_2-xO_x films; next, the precursors in natural environment for 60 d were oxidized; finally, the MoS_2-xO_x films after a thermal annealing process were obtained. Herein, the angle between the sputtering plume and the glass substrate was specifically varied. The optical properties of MoS_2-xO_x films were investigated. X-ray photoelectron spectroscopy was used to analyze the elements and valence states of the samples. Scanning electron microscopy results show that the surface morphology is optimal at an angle of 45° (θ=45°) between the sputtering plume and the substrate. UV-Vis spectrophotometry results show that the optical band gap of the MoS_2-xO_x films decreasing as the thickness and oxygen content increasing. COMSOL Multiphysics software was utilized to simulate the transmittance of MoS_2-xO_x films, and the theoretical and experimental results agree well. The results of this paper will provide experimental data reference for the application of MoS_2-xO_x in the field of optical devices.

Key words: oxygen-doped molybdenum disulfide, oxygen-assisted technology, magnetron sputtering, plume, transmittance, optical band gap, COMSOL

中图分类号:

赵子楠, 武金涛, 梁智健, 朱亚彬, 刘歌, 陈云琳. 溅射羽辉与基底夹角对掺氧二硫化钼薄膜光学性质的影响[J]. 人工晶体学报, 2022, 51(11): 1871-1877.

ZHAO Zinan, WU Jintao, LIANG Zhijian, ZHU Yabin, LIU Ge, CHEN Yunlin. Effect of Sputtering Plume and Substrate Angle on the Optical Properties of Oxygen-Doped Molybdenum Disulfide Film[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(11): 1871-1877.

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