CaF2晶体亚表面损伤层表征及其光热弱吸收关联特性研究

doi:10.16553/j.cnki.issn1000-985x.2026.0064

摘要/Abstract

摘要： 光学元件的表面质量直接决定其光学性能与使用寿命，其中亚表面损伤（SSD）层作为影响光学元件功能和可靠性的核心因素，已成为光学元件应用中的重点关注指标。本文以CaF₂晶体为研究对象，围绕亚表面损伤层的表征及与355 nm波段光热弱吸收的关联展开研究。通过对晶体样品的亚表面损伤层厚度进行系统表征，并测试其在355 nm波段的光热弱吸收率，系统分析了亚表面损伤层厚度与光热弱吸收率之间的关系。结果表明，355 nm波段光热弱吸收率与SSD层厚度呈正相关，当损伤层厚度从51.57 nm增至154.09 nm时，光热弱吸收最大值由2.58×10^-6提高至45.16×10^-6，弱吸收平均值由0.43×10^-6提高至7.85×10^-6。本研究明确了亚表面损伤层对CaF₂晶体光热弱吸收的影响规律，可为优化晶体加工工艺、抑制弱吸收损耗、提升晶体激光损伤阈值提供实验依据与理论支撑。

关键词: CaF₂晶体; 亚表面损伤层; 光热弱吸收; 化学腐蚀法; 表面粗糙度

Abstract: The surface quality of optical components directly determines their optical performance and service life. Among these factors， the subsurface damage （SSD） layer is a key factor affecting the functionality and reliability of optical components and has become a focal point in their application. This paper takes CaF₂ crystals as the research subject and focuses on the characterization of the subsurface damage layer and its correlation with photothermal weak absorption in the 355 nm wavelength band. By systematically characterizing the thickness of the subsurface damage layer in crystal samples and measuring their photothermal weak absorption rates at 355 nm， the relationship between subsurface damage layer thickness and photothermal weak absorption rate was systematically analyzed. The results indicate that the photothermal weak absorption rate in the 355 nm band is positively correlated with SSD thickness. As the damage layer thickness increase from 51.57 nm to 154.09 nm， the maximum photothermal weak absorption rise from 2.58×10^-6 to 45.16×10^-6， and the average weak absorption increase from 0.43×10^-6 to 7.85×10^-6. This study has elucidated the mechanism by which subsurface damage layers affect the photothermal weak absorption of CaF₂ crystals， providing both experimental evidence and theoretical support for optimizing crystal processing techniques， mitigating losses due to weak absorption， and enhancing the crystals’ laser damage thresholds.

Key words: CaF₂ crystal; subsurface damage layer; photothermal weak absorption; chemical etching method; surface roughness

中图分类号:

O734

闫柯, 梅炳初, 张博, 寇华敏, 姜大朋, 高文兰, 苏良碧. CaF₂晶体亚表面损伤层表征及其光热弱吸收关联特性研究[J]. 人工晶体学报, 2026, 55(8): 1252-1260.

YAN Ke, MEI Bingchu, ZHANG Bo, KOU Huamin, JIANG Dapeng, GAO Wenlan, SU Liangbi. Characterization of Subsurface Damage Layer in CaF₂ Crystals and Its Correlation Properties of Photothermal Weak Absorption[J]. Journal of Synthetic Crystals, 2026, 55(8): 1252-1260.

图/表 10

图1 CaF2晶体化学腐蚀过程中的白光干涉表面形貌演化图

Fig.1 Evolution of the surface morphology of a CaF2 crystal during chemical etching， as observed by white-light interference

表1 CaF2晶体化学腐蚀过程中三维粗糙度参数Sa与Sq值

Table 1 Values of the three-dimensional roughness parameters Sa and Sq during the chemical etching of CaF2 crystals

Time/min	Sa/nm	Sq/nm
5	4.031 1	6.584 4
10	5.603 1	11.634 6
15	12.843 0	23.208 8
20	7.793 3	14.607 5
25	5.419 1	10.644 6
30	11.083 4	21.986 4
35	11.243 8	22.095 1
40	11.976 5	22.396 4
45	12.289 1	23.453 2

图2 CaF2晶体不同腐蚀时长下残余应力分布云图

Fig.2 Contour plots of residual stress distribution in CaF2 crystals under different corrosion durations

图3 CaF2晶体不同腐蚀阶段台阶区域形貌图

Fig.3 Morphology of the stepped regions of CaF2 crystals at different stages of etching

表2 不同腐蚀时间下台阶高度、分台阶高度和区间腐蚀速率

Table 2 Step height， sub-step height， and interval corrosion rates under different corrosion durations

Time/min	Step height/nm	Sub-step height/nm	Interval corrosion rate/（nm·min^-1）
5	53.63	53.63	—
10	72.68	19.05	3.81
15	95.14	22.46	4.49
20	122.62	27.48	5.50
25	154.09	31.47	6.29
30	175.01	20.92	4.18
35	186.54	11.53	2.31
40	197.57	11.03	2.21
45	208.87	11.30	2.26

图4 台阶高度变化图（a）与区间腐蚀速率变化图（b）

Fig.4 Plot of step height variation （a） and plot of corrosion rate variation over the interval （b）

图5 4组样品的光热弱吸收图谱

Fig.5 Photothermal weak absorption spectra of the four samples group

表3 4组样品的弱吸收及亚表面损伤层厚度数值

Table 3 Values for weak absorption and thickness of the subsurface damage layer for the four groups of samples

Sample	Maximum photothermal weak absorption/10^-6	Average photothermal weak absorption/10^-6	Subsurface damage layer thickness/nm
a	2.58	0.43	51.57
b	4.37	0.86	65.86
c	21.41	6.39	106.31
d	45.16	7.85	154.09

图6 4组样品的区间腐蚀速率变化图

Fig.6 Graph showing the variation in pitting corrosion rates for the four groups of samples

图7 光热弱吸收与亚表面损伤层厚度关系图

Fig.7 Relationship between photothermal weak absorption and the thickness of the subsurface damage layer

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CaF₂晶体亚表面损伤层表征及其光热弱吸收关联特性研究

Characterization of Subsurface Damage Layer in CaF₂ Crystals and Its Correlation Properties of Photothermal Weak Absorption

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