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Journal of Synthetic Crystals ›› 2025, Vol. 54 ›› Issue (3): 491-510.DOI: 10.16553/j.cnki.issn1000-985x.2025.0001

• Device Fabrication • Previous Articles     Next Articles

Research Progress of Gallium Oxide Micro/Nano Structure-Based Detectors

CHEN Junhong, HU Jianwen, WEI Zhongming   

  1. State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2024-12-31 Online:2025-03-15 Published:2025-04-03

Abstract: Gallium oxide (Ga2O3), a semiconductor material with a wide bandgap (approximately 4.9 eV) and unique optoelectronic properties, has attracted significant attention in recent years for applications in ultraviolet photodetectors (UVPD), photodetectors, and optoelectronic sensors. Ga2O3's micro/nano structures, such as nanowires, nanorods, nanotubes, and nanosheets, exhibit excellent optoelectronic response characteristics, fast electron mobility, and high stability, making them crucial for enhancing the performance of detectors. This paper introduces various synthesis methods for Ga2O3 micro/nano structures, including hydrothermal, electrochemical deposition, and vapor deposition methods. The advantages and disadvantages of these techniques are analyzed, and how to achieve precise control over the morphology and size of Ga2O3 micro/nano structures by adjusting reaction conditions is discussed. Furthermore, the application of these micro/nano structures in ultraviolet photodetectors is explored, particularly their potential in high-sensitivity, high-selectivity, and polarization-sensitive optoelectronic detectors.

Key words: gallium oxide, micro/nano structure, photodetector, wide bandgap semiconductor

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