Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (8): 1541-1547.

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Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering

LIU Huan;ZHU Ruzhong;GONG Jianchao;WANG Qikun;FU Danyang;LEI Dan;HUANG Jiali;WU Liang

Online:2020-08-15 Published:2021-01-20

Abstract

CLC Number:

TN304

LIU Huan;ZHU Ruzhong;GONG Jianchao;WANG Qikun;FU Danyang;LEI Dan;HUANG Jiali;WU Liang. Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2020, 49(8): 1541-1547.

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Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering

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