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人工晶体学报 ›› 2025, Vol. 54 ›› Issue (3): 386-395.DOI: 10.16553/j.cnki.issn1000-985x.2024.0292

• 晶体生长、掺杂和缺陷 • 上一篇    下一篇

采用不同辐射传热模型模拟氧化镓单晶生长热场的对比研究

殷长帅1, 孟标2, 梁康1, 崔翰文1, 刘胜1, 张召富1   

  1. 1.武汉大学工业科学研究院,武汉 430072;
    2.湖北省九峰山实验室,武汉 430206
  • 收稿日期:2024-11-15 出版日期:2025-03-15 发布日期:2025-04-03
  • 通信作者: 张召富,博士,教授。E-mail:zhaofuzhang@whu.edu.cn; 张召富,武汉大学教授、博士生导师,香港科技大学博士、剑桥大学博士后。从事宽禁带半导体材料的界面、器件、工艺以及先进封装的多尺度建模仿真协同设计。入选国家海外高层次青年人才、湖北省创新人才。
  • 作者简介:殷长帅(1996—),男,湖北省人,博士研究生。E-mail:yinchangshuai@whu.edu.cn
  • 基金资助:
    湖北省JD技术攻关项目(2023BAA009);国家自然科学基金(52302046)

Comparative Study on Thermal Field of Ga2O3 Single Crystal Growth Simulated by Different Thermal Radiation Models

YIN Changshuai1, MENG Biao2, LIANG Kang1, CUI Hanwen1, LIU Sheng1, ZHANG Zhaofu1   

  1. 1. The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China;
    2. JFS Laboratory, Wuhan 430206, China
  • Received:2024-11-15 Online:2025-03-15 Published:2025-04-03

摘要: 采用导模法(EFG法)生长高质量的氧化镓单晶时,炉内的辐射传热对晶体生长过程中的温场分布、应力分布等具有显著的影响。本文采用Rosseland方法、P1近似方法、离散坐标法(DOM)等3种不同辐射模型,对生长氧化镓单晶的三维热场分布进行有限元分析,采用热弹性应力模型分析求解晶体在不同热通量下的应力分布情况。数值模拟结果表明,采用不同辐射模型计算的热场存在明显差异:在相同的加热功率下,Rosseland辐射模型的固液界面温度梯度最小,DOM方法具有最大的温度梯度;在相同热通量下,DOM辐射模型在冷却初期表现出最高的热应力,而Rosseland模型在冷却的最后阶段热应力最高;在不同的热通量条件下,Rosseland辐射模型的应力和温度变化最显著。该研究工作为氧化镓和其他相关单晶材料的生长热场设计提供一定的理论指导。

关键词: 导模法, 氧化镓, 辐射模型, 热场, 数值模拟, 应力

Abstract: High-quality gallium oxide (Ga2O3) single crystals were grown using the edge-defined film-fed growth method (EFG method), with the radiation heat transfer inside the furnace significantly impacting the temperature field distribution and stress distribution during the crystal growth process. Therefore, this study uses different finite element methods to analyze the three-dimensional thermal field distribution of Ga2O3 single crystal growth under three different radiation models, including the Rosseland method, the P1 approximation method, and the discrete ordinates method (DOM). A thermoelastic stress model is used to solve the stress distribution within the crystal under different heat flux conditions. Numerical simulation results indicate significant differences in the thermal field calculations under different radiation models. With the same heating power, the Rosseland radiation model has the smallest temperature gradient at the solid-liquid interface, while DOM has the largest temperature gradient. Under the same heat flux, the DOM radiation model exhibits the highest thermal stress during the early cooling stage, while the Rosseland model shows the highest thermal stress during the final cooling stage. Under varying heat flux conditions, the Rosseland radiation model displays the most significant changes in stress and temperature. This research provides theoretical guidance for the thermal field design in single crystal growth for gallium oxide and other related materials.

Key words: EFG method, gallium oxide, radiation model, thermal field, numerical simulation, stress

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